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image of gowning equipment in the gowning area of cleanroom at UConn IMS

The cleanroom at UConn IMS is 2,000 square feet under filter with a 3,900 square foot service area. There are four distinct research bays, each associated with a different cleanroom process, and all arranged in a linear sequence of increasing cleanliness, starting at ISO 5 and progressing to ISO 4. Each space is provided with services and infrastructure to support the associated tooling.

Etching

person working a plasma cleaner in cleanroom bay 1

Deposition

person working at wire bonder in cleanroom bay 2

Characterization

person working at binocular microscope in cleanroom bay 3

Lithography

person working at mask aligner in cleanroom bay 4