UConn IMS Cleanroom

AmScope Binocular Microscope

40X to 2500X expanded magnification range using high-quality, color-coded objective lenses, and 10X and 25X eyepieces for six unique settings, ideal for viewing semiconductor chips, devices, cellular structures, and microorganisms.

Wet Processing and Cleaning Stations, Bake Plates, Spin-Coater, Sonicator

There are six wet chemistry fume hoods, a combination of stainless steel and polymer units designed for various chemical processing tasks (cleaning, wet etching, etc.) employed in semiconductor and microelectronic device fabrication.

Hood 3 in Bay Area 3 (Solvent Hood) provides a comprehensive selection of developers and removers for various development processes. Hood 4 in Bay Area 3 (Sonicator Hood) is a stainless-steel hood featuring an ultrasonic bath for cleaning applications.